Process

The Process tab in the 3d dock runs an ordered list of fabrication-like steps (extrude, etch, doping, deposit, fill, planarize, …) from the current 2d cell into the 3d view. The list is a JSON recipe. This tab is available from release 20260825.

It replaces the older Deposit tab as the default. A link at the bottom of the tab switches back to that interface.

Using the tab

Each row is one step. The checkbox enables or skips it. Double-click a row (or context menu Edit) to open the step dialog. Add appends a step; Run executes all enabled steps into the current 3d cell (one undo slot).

The context menu also offers move up/down, add above/below, Run until here, delete, and Load recipe… / Save recipe….

A PDK can ship 3d_process.json next to loadLayers.layout ($PDK/libs.tech/LayoutEditor/). Open-PDK import copies that file for technologies that include it. The Technology menu item 3D process loads it and builds the 3d view.

From a script:

layout->view3dTool->loadProcessRecipe("/path/to/recipe.json");
layout->view3dTool->runProcess();

The current list is stored in the setup (setup/3d/processRecipe) and restored on the next start.

JSON recipe

The file is UTF-8 JSON. Lengths, coordinates, and z values are database units of the 2d layout (the same integers as in the layout window). Angles are degrees. The runner accepts either an object with a steps array or a bare array of steps:

{
  "steps": [ { "op": "extrude", "layer": 1, "source": 1, "z0": 0, "z1": 1000 } ]
}

Any other key on the root object is ignored (name, units, comments, …). Unknown keys on a step are ignored as well.

Run does not clear the 3d cell first. Put a clearView step at the start if the recipe should replace the previous result.

If a step fails, the remaining steps are not run. The message is prefixed with the step name when that field is set.

Common fields

2d mask

Used by extrude, etch, dope, deposit, fill, setSurface. The first matching form wins:

1. rect — axis-aligned box [x0, y0, x1, y1] in DBU.
2. polygons — array of rings. Each ring is a flat list [x0, y0, x1, y1, …] (at least three points). The ring is closed if needed. Paths and boxes selected in the editor are stored in this form.
3. source — layer or selection (see below).
4. If source is omitted, layer is used as the mask layer.

Several polygons on the same layer are unioned for extrude.

Operations (op)

Aliases: doping → dope, clear → clearView.

extrude

Prism (or loft) from the mask between z0 and z1, added on layer.

etch

The same prism is subtracted from every existing 3d mesh. The remaining volume replaces the 3d cell on layer.

dope

Implant: a prism from the current surface downward by depth, intersected with existing material, then subtracted from the hosts so the doped volume is visible as its own mesh on layer.

deposit

Constant thickness on top of the current surface (existing meshes plus earlier setSurface overlays), added on layer.

fill

Fill everything under the mask up to toLevel (not a constant film thickness).

planarize

CMP: cut every 3d mesh at zCut. No mask. No destination layer.

release

Remove all 3d meshes on layer (sacrificial material). Typical MEMS release after a later structural layer has been built.

setSurface

Set the surface height under the mask to toLevel without adding a mesh. Later deposit / fill / dope follow this overlay (air bridges and similar).

resetSurface

Clear surface overlays and stop using mesh heights. Following deposit/fill see a flat zero surface.

clearView

Delete all meshes in the current 3d cell and reset the surface. Use this as the first step of a full rebuild.

fillet

Reserved (radius in DBU). The Process tab does not offer this type yet; a fillet step in a file is skipped.

Example

{
  "name": "demo stack",
  "steps": [
    { "op": "clearView", "name": "clear 3D view" },
    {
      "op": "extrude",
      "name": "substrate",
      "layer": 0,
      "source": -3,
      "z0": 0,
      "z1": 2000
    },
    {
      "op": "etch",
      "name": "trench",
      "layer": 0,
      "source": 2,
      "z0": 0,
      "z1": 2000,
      "bias": 200
    },
    {
      "op": "dope",
      "name": "nsdm implant",
      "layer": 3,
      "source": 3,
      "datatype": 0,
      "depth": 100,
      "optional": true
    },
    {
      "op": "deposit",
      "name": "oxide",
      "layer": 4,
      "source": -3,
      "thickness": 500,
      "edgeCover": 20
    },
    { "op": "planarize", "name": "cmp", "zCut": 2200 },
    {
      "op": "extrude",
      "name": "metal",
      "layer": 5,
      "source": 5,
      "z0": 2200,
      "z1": 2800,
      "sidewallDeg": 5
    },
    {
      "op": "fill",
      "name": "ild",
      "layer": 6,
      "rect": [0, 0, 100000, 80000],
      "toLevel": 2800
    }
  ]
}