The Nanometer Pattern Generation System (NPGS) is a Scanning Eletron Microskope (SEM ) lithography system. The objective for NPGS is to provide a powerful, versatile, and easy to use system for advanced electron beam lithography. It can also be used for ion beam lithography using a commercial SEM (Scanning Electron Microscope), STEM (Scanning Transmission Electron Microscope), FIB (Focused Ion Beam), dual beam (SEM/FIB), or Helium Ion microscope. It is shiped with a software DesignCAD, which produces the required input data. The associated file format is DC2. However, the NPGS system only uses a subset of possible entities.
The LayoutEditor can read and write the DC2 format. The supported entities are identical to the entities supported by the NPGS. The generated files can be directly used and existing files can be checked on their appearance after exposure.
The DC2-NPGS file format does not support hierarchy. The current drawing will be saved as a flat copy. Also, text elements are not supported and cannot be saved. DC2-NPGS files are ASCII text files, mostly using numbers. Here is an example of a DC2-NPGS file:
0 0 0 0 0
42 20 0 0 0 0
1000
0 0
0
3
16
0
0
1
0
0
1
example2.vfn
0.0 0.0 0.0 0.0
0.0 0.0 0.0 0.0
0.0 0.0 0.0 0.0
0.0 0.0 0.0 0.0
1
1 0 0 0 0 0 0 0
1.0 1.0 1.0 1.0
1.0 1.0 1.0 1.0
21 0 0 0 0 0
1 4 1 0 0 10 0 1 0 255 0 0 0 1
-4000 -30000
-2000 -58000
18000 -56000
4000 -48000
21 1 0 0 0 0
1 5 1 0 1 10 0 1 0 255 0 0 10 1
7000 1000
7000 -15000
25000 -15000
25000 1000
7000 1000
21 6 0 0 0 0
1 5 1 0 1 10 0 1 0 255 0 0 10 1
13950 -37990
13950 -38000
13970 -38000
13970 -37990
13950 -37990
1 5 1 0 1 10 0 1 0 255 0 0 10 1
29950 -53990
29950 -54000
29970 -54000
29970 -53990
29950 -53990
1 5 1 0 1 10 0 1 0 255 0 0 10 1
19950 -37990
19950 -38000
19970 -38000
19970 -37990
19950 -37990
1 5 1 0 1 10 0 1 0 255 0 0 10 1
11950 -25990
11950 -26000
11970 -26000
11970 -25990
11950 -25990
1 5 1 0 1 10 0 1 0 255 0 0 10 1
13950 -24990
13950 -25000
13970 -25000
13970 -24990
13950 -24990
1 5 1 0 1 10 0 1 0 255 0 0 10 1
33950 -8990
33950 -9000
33970 -9000
33970 -8990
33950 -8990
1 5 1 0 1 10 0 1 0 255 0 0 10 1
32950 -15990
32950 -16000
32970 -16000
32970 -15990
32950 -15990